| 简介 |
PROBLEM TO BE SOLVED : To provide a ceramic heater capable of preventing the migration of metal ions in a grain boundary phase in a high-temperature environment, and excelling in corrosion resistance and a high-temperature characteristic. SOLUTION : This ceramic heater is provided with : a heating element containing, as a main constituent, at least one kind out of silicide, nitride and carbide of molybdenum, and silicide, nitride and carbide of tungsten; and a base body containing silicon nitride as a main constituent, containing 4-25 mass% of a rare-earth element in terms of oxide, and 0.02-1 mass% of an aluminum constituent in terms of aluminum nitride, and containing 1-8 vol.% of at least one kind of silicide selected from a group comprising molybdenum, vanadium, tungsten and chromium, wherein the ratio of the quantity of oxygen of the rare-earth element to the total quantity of oxygen is 0.3-0.6, and is characterized in that the monosilicate and/or disilicate of the rare-earth element is a main crystal phase on the surface of the base body, and the heating element is embedded in the base body. COPYRIGHT : (C)2009, JPO&INPIT |
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