| 简介 |
PROBLEM TO BE SOLVED : To provide an electrostatic chuck member which is to be used in an atmosphere of halogen-based corrosive gas such as fluorine-based or chlorine-based corrosive gas, and plasma thereof, and has a sufficient attraction force and a mechanical strength.
SOLUTION : The electrostatic chuck member comprises a complex oxide sintered compact including yttrium aluminum oxide in which the yttrium is partially substituted with rare earth elements (RE) other than yttrium. The ratio [NRE/(NY+NRE)] of the number (NRE) of atoms of the rare earth elements other than yttrium to the sum (NY+NRE) of the number (NY) of yttrium atoms and the number (NRE) of atoms of the rare earth elements other than yttrium is no less than 0.01 and below 0.5. The volume resistance value thereof is no less than 1×1010 and below 1×1015 Ω cm.
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