| 简介 |
PROBLEM TO BE SOLVED : To provide a transparent conductive substrate which is inexpensive and has excellent mechanical strength and good chemical durability without using a rare metal and an electronic device and a touch panel using the same.
SOLUTION : A transparent conductive substrate 1 comprises : a transparent substrate 12 having electrically insulating properties; and a transparent conductive film 13 having a specific resistance of 2.0×10-3 Ω cm or less by doping a low-valent metal oxide with zinc oxide formed on the transparent substrate 12 as a dopant so that a rate of 0.02 to 0.1 in an atom number ratio of low-valent metal/zinc is achieved. The transparent conductive film 13 is mainly composed of zinc oxide and formed by a sputtering method, an ion plating method, a pulse laser deposition method (a PLD method) or an electron beam (EB) deposition method by using a target or a tablet doped with a low valent metal oxide.
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