客服热线:18202992950

METHOD FOR STORING METALLIC LANTHANUM TARGET, VACUUM-SEALED METALLIC LANTHANUM TARGET, AND THIN FI 发明申请

2023-04-28 1530 1896K 0

专利信息

申请日期 2025-07-16 申请号 WOJP12053242
公开(公告)号 WO2012117834A1 公开(公告)日 2012-09-07
公开国别 WO 申请人省市代码 全国
申请人 JX Nippon Mining Metals Corporation; NARITA Satoyasu; SATOH Kazuyuki; KOIDO Yoshimasa
简介 This method for storing a metallic lanthanum sputtering target is characterized by : processing ahead of time in a manner so that the surface roughness (Ra) of a metallic lanthanum target that is to be stored becomes no greater than 1 μm; then inserting the metallic lanthanum target, to which a lanthanum fluoride coating has been formed, into a vacuum pack having an oxygen permeability of no greater than 0.1 cm3/m2·24h·atm and a water vapor permeability of no greater than 0.1 g/m2·24h; and then evacuating, sealing, and storing the vacuum pack. The present invention provides a technique that contrives a method for storing targets of metallic lanthanum, a rare earth metal, suppresses the phenomenon of turning into powder due to oxidation of the target due to residual and infiltrated air, and enables long-term storage in a usable state as a sputtering target.


您还没有登录,请登录后查看下载地址


反对 0举报 0 收藏 0 打赏 0评论 0
下载排行
网站首页  |  关于我们  |  联系方式  |  使用协议  |  版权隐私  |  网站地图  |  排名推广  |  广告服务  |  积分换礼  |  网站留言  |  RSS订阅  |  违规举报  |  京ICP备2021025988号-4