| 简介 |
A ceramic heater element (10) comprises an insulating base (101) and a heat generating resistor body (102) that is buried in the insulating base (101). The insulating base (101) has β-SiAlON or multiphase SiAlON of β-SiAlON and α-SiAlON as the main phase, and comprises a grain boundary phase that contains a rare earth element and a silicide of at least one element selected from among Cr, W, Mo, V and Fe. The heat generating resistor body (102) has a conductive compound as the main phase, said conductive compound being composed of at least one substance selected from among a silicide, nitride and carbide of Mo and a silicide, nitride and carbide of W, and comprises β-SiAlON or multiphase SiAlON of β-SiAlON and α-SiAlON and a grain boundary phase that contains a rare earth element. |
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