| 简介 |
The method involves placing a solid sample (3) in a luminescent discharge lamp (2), and injecting gas mixture with rare gas and gaseous oxygen in the lamp. A pulsated radio frequency type electric discharge is applied to electrodes of the lamp to generate luminescent discharge plasma. An organic material layer is exposed to the plasma to obtain imaging speed of the layer greater than imaging speed produced by the plasma in the rare gas without oxygen. A signal representative of ionized and/or excited species of the plasma is measured by a spectrometer (4) e.g. optical emission spectrometer. The inert gas is argon, neon, helium or mixture of the inert gas. |
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