| 申请日期 | 2025-08-26 | 申请号 | JP2010195878 |
| 公开（公告）号 | JP2012054102A | 公开（公告）日 | 2012-03-15 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | UNIV TOHOKU | ||
| 简介 | PROBLEM TO BE SOLVED : To provide a cathode body that has a boride film of rare earth element and can prevent interdiffusion of component elements between a substrate and the cathode body. SOLUTION : The cathode body includes : a cylindrical cup 30 as a substrate; a barrier layer 303 that has SiC and is provided on the surface of the cylindrical cup 30; and a film that has boride of rare earth element and is provided on the surface of the barrier layer 303. COPYRIGHT : (C)2012, JPO&INPIT | ||
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