| 简介 |
The present invention relates to a dense rare earth metal oxide coating film for sealing a porous ceramic surface, and a preparation method thereof. Particularly, the present invention relates to a rare earth metal oxide coating film formed on a porous ceramic film of a substrate, wherein the porous ceramic film has an average surface roughness of 0.4 to 2.3 m. The dense rare earth metal oxide coating film for sealing a porous ceramic surface, and the preparation method thereof, according to the present invention, can provide not only the effect of ensuring withstand voltage characteristics due to the porous ceramic coating film having a sufficient thickness but also the effect of ensuring plasma resistivity due to the dense rare earth metal oxide coating film, and can therefore be applied to various parts of a semiconductor apparatus including a semiconductor etching apparatus. |
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