| 申请日期 | 2025-07-08 | 申请号 | KR1020030095990 |
| 公开（公告）号 | KR101121364B1 | 公开（公告）日 | 2012-02-21 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | SHIN ETSU CHEMICAL CO LTD | ||
| 简介 | An electrostatic chuck is provided in which a lower oxide coating, an electrode, and an upper oxide coating are formed on a substrate. The lower oxide coating is formed by spraying an oxide of Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu and has a dielectric strength of 15-50 kV/mm. | ||
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