| 简介 |
PROBLEM TO BE SOLVED : To provide a material for film formation low in hygroscopicity in spite of containing magnesium oxide and alkaline-earth metal oxide other than magnesium oxide, and capable of manufacturing a film high in a secondary electron emission coefficient by a physical vapor-phase epitaxial method such as an electron beam deposition method or a sputtering method.
SOLUTION : This composite alkaline-earth metal oxide contains magnesium oxide and alkaline-earth metal oxide other than magnesium oxide at a ratio in the range of 98 : 2 to 80 : 20 as a molar ratio of magnesium to alkaline-earth metal other than magnesium, wherein relative density is in the range of 95.0-99.9%. The composite alkaline-earth metal oxide contains oxide of at least one metal element having a valence of trivalence, tetravalence or pentavalence at an amount in the range of 0.0002-0.1 mol as an amount of the metal element with respect to 1 mol of the alkaline-earth metal.
COPYRIGHT : (C)2012, JPO&INPIT |
客服热线：
手机版
二维码
