| 简介 |
PURPOSE : A method for forming multi-component conductive oxide and a method for manufacturing a capacitor using the same are provided to improve an interface property due to lattice mismatch by easily controlling the composition ratio of noble metal in the conductive oxide. CONSTITUTION : A multi-component conductive oxide includes a first element selected among transition metal or alkali earth metal and a second element among noble metal. A first thin film including the first element selected among Sr, Ti, or Ba is formed. A second thin film including a second element is formed on the first thin film. A pre-catalyst process and a post-catalyst process are respectively performed before and after the second thin film is formed. |
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