| 简介 |
PROBLEM TO BE SOLVED : To provide a plasma generator and a plasma generating method capable of generating uniform low temperature plasma at low cost. SOLUTION : A metallic tube electrode 12 is installed on the inner face of a dielectric tube 11 inside of which a rare gas 15 is flowed, and a metallic tube electrode 13 is installed so as to contact the outer face of the dielectric tube 11 and so as not to overlap with the metallic tube electrode 12. When voltage is impressed between the metallic tube electrode 12 and the metallic tube electrode 13, a dielectric barrier discharge D is generated on the inner face of the dielectric tube 11. In the state that the dielectric barrier discharge D is generated, when the rare gas 15 is introduced in the dielectric tube 11 and the rare gas 15 is flowed in the discharge portion, the rare gas 15 blows out high energy particles generated by dielectric barrier discharge D. Thereafter, collision occurs between atoms and molecules in the rare gas and the high energy particles, and the rare gas 15 becomes uniform low temperature plasma P in the space and is emitted from the nozzle of the dielectric tube in torch shape. COPYRIGHT : (C)2006, JPO&NCIPI |
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