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Magnesium oxide deposition material and its manufacturing method 发明授权

2023-02-23 4910 86K 0

专利信息

申请日期 2025-06-28 申请号 JP2008155790
公开(公告)号 JP4818318B2 公开(公告)日 2011-11-16
公开国别 JP 申请人省市代码 全国
申请人 Ube Material Industries Inc119988
简介 PURPOSE : A polycrystalline magnesium oxide material, its manufacturing method, and a method for manufacturing a magnesium oxide film are provided to form an oxide magnesium film where a rare earth metal is dispersed uniformly. CONSTITUTION : A polycrystalline magnesium oxide material comprises the polycrystal of magnesium oxide crystal particles having an average crystal diameter of 2.0 ~ 50 micrometers, wherein 0.005 ~ 0.060 mass% of a rare earth metal is dispersed in the magnesium oxide crystal particles. The rare earth metal is at least one kind of metal selected from the group consisting of Dy, Gd, Eu, Ho, Er, Tb, Yb, Tm and Lu. Preferably the rare earth metal is at least one kind of metal selected from the group consisting of Dy, Gd, Eu, Ho and Er.


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