| 简介 |
PROBLEM TO BE SOLVED : To provide an electrostatic chuck which has excellent durability for fluorine plasma and is usable for a long period of time. SOLUTION : The electrostatic chuck is composed of ceramic whose main component is alumina, and comprises a base 2 having a planer upper side 2a; and a corrosive-resistant layer 11 formed covering the surface containing at least of the upper side 2a of the base 2. The corrosive-resistant layer 11 contains two or more oxides selected from a fluoride of an alkali earth metal and a fluoride of a rare earth element, and low thermal expansion ceramic fine particles. COPYRIGHT : (C)2008, JPO&INPIT |
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