| 简介 |
An aluminum nitride-based sintered compact (1) includes : aluminum nitride crystal particles (2) containing Mg; composite oxide containing a rare earth element and Al, the composite oxide having a garnet crystal structure; and composite oxynitride containing Mg and Al. Particles (3) of the composite oxide and particles (4) of the composite oxynitride are interspersed between the aluminum nitride crystal particles (2). The composite oxide may include Y. A content of Mg in the aluminum nitride crystal particles (2) may fall in a range of 0.1 mol% or more and 1.0 mol% or less, based on a total of all metal elements contained in the aluminum nitride crystal particles taken as 100 mol%. A semiconductor holding device includes the aluminum nitride-based sintered compact (1); and an electrostatic adsorptive electrode (13). |
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