| 申请日期 | 2025-07-08 | 申请号 | JP2016521573 |
| 公开（公告）号 | JP6496308B2 | 公开（公告）日 | 2019-04-03 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | APPLIED MATERIALS INCORPORATED | ||
| 简介 | A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y3Al5O12 having a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm3/s+/−up to 30%. | ||
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