| 简介 |
PROBLEM TO BE SOLVED : To provide an Al alloy film for a display device which does not undergo the formation of hillocks even when exposed to high temperature of about 450 to 600°C, and has excellent high temperature heat resistance, low electrical resistance (wiring resistance) and excellent corrosion resistance under alkaline environments.
SOLUTION : Specifically disclosed is an Al alloy film for a display device, which comprises at least one element selected from a group X consisting of Ta, Nb, Re, Zr, W, Mo, V, Hf, Ti, Cr and Pt and at least one rare earth element, and which meets the following requirement (1) when heated at 450 to 600°C. (1) Precipitates each having an equivalent circle diameter of 20 nm or more are present at a density of 500, 000 pieces/mm2 or more in a first precipitation product containing at least one element selected from Al and the elements included in the group X and at least one rare earth element.
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