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METHOD FOR MANUFACTURING PERPENDICULAR MAGNETIC RECORDING MEDIUM 发明申请

2023-03-25 4500 62K 0

专利信息

申请日期 2025-06-28 申请号 JP2010008159
公开(公告)号 JP2011146113A 公开(公告)日 2011-07-28
公开国别 JP 申请人省市代码 全国
申请人 FUJI ELEC DEVICE TECH CO LTD
简介 PROBLEM TO BE SOLVED : To form a granular magnetic layer with high characteristic while reducing the amount of expensive Pt or Ru required. SOLUTION : A perpendicular magnetic recording medium includes a magnetic recording layer formed from ferromagnetic crystal grains and oxide-including non-magnetic crystal grain boundaries and provided on a non-magnetic substrate. The method of producing the perpendicular magnetic recording medium is initiated by forming the magnetic recording layer by a reactive sputtering method using rare gas containing 2% by volume to 10% by volume of oxygen gas at an initial stage of film formation. The method continues by successively forming the magnetic recording layer by reactive sputtering while reducing the concentration of the oxygen gas. The method may further include forming an undercoat layer of Ru or a Ru-alloy under the magnetic recording layer. COPYRIGHT : (C)2011, JPO&INPIT


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