| 简介 |
PROBLEM TO BE SOLVED : To provide a corrosion-resistant member which is used in halogen-based corrosive gasses such as a fluorine-based corrosive gas and a chlorine-based corrosive gas and in the plasma of these gasses and has the dielectric constant and strength enough to use as an electrostatic chuck.
SOLUTION : The corrosion-resistant member has a sintered compact of a compound oxide including aluminum, yttrium and a rare-earth element except for yttrium. The sintered compact has the ratio [NRE/(NY+NRE)] being the ratio of the number of atoms (NRE) of the rare-earth element except for the yttrium to the sum (NY+NRE) of the number of atoms (NY) of the yttrium and the number of atoms (NRE) of the rare earth element except for the yttrium of ≥0.05 and <0.5. The average particle size in the sintered compact is 0.5-10 μm and the maximum particle size is ≤30 μm.
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