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CERAMIC STRUCTURE, MEMBER FOR SUBSTRATE HOLDING DEVICE, AND METHOD FOR MANUFACTURING CERAMIC STRUC 发明授权

2023-08-24 4610 414K 0

专利信息

申请日期 2025-07-01 申请号 KR1020177004984
公开(公告)号 KR101963521B1 公开(公告)日 2019-03-28
公开国别 KR 申请人省市代码 全国
申请人 엔지케이 인슐레이터 엘티디
简介 The ceramic structure 10 includes a discoid ceramic base 12 and an electrode 14 buried in the ceramic base 12. The ceramic base 12 is a sintered body composed principally of alumina or a rare-earth metal oxide and has a thermal expansion coefficient of 7.5 to 9.5 ppm/K over the range of 40° C. to 1200° C. The electrode 14 is composed principally of metal ruthenium. The electrode 14 may be formed in the shape of a sheet. Alternatively, the electrode 14 may be patterned in the manner of a one-stroke sketch so as to extend over the entire cross section of the ceramic base 12.


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