| 申请日期 | 2025-06-25 | 申请号 | US11550929 |
| 公开（公告）号 | US7968205B2 | 公开（公告）日 | 2011-06-28 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Hajime Nakano; Toshihiko Tsukatani; Takao Maeda | ||
| 简介 | A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer. | ||
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