| 简介 |
PROBLEM TO BE SOLVED : To provide a heat treatment process which is effective to improve the uniformity of the in-plane distribution of superconducting characteristics when a rare earth superconducting composite metal oxide film is produced by an application/thermal-decomposition method, in particular, a rare-earth superconducting film is produced on a large area substrate.
SOLUTION : In the heat treatment process, thin films of a metal-containing compound, applied on various supports or substrates, are calcined at a temperature of 200-650°C in an atmosphere having oxygen partial pressure of 0.2-0.8 atm, and including water vapor and having a dew point of ≥20°C, thereby an organic component contained in the applied film is uniformly removed, and the uniformity of the in-plane distribution of superconducting characteristics is improved.
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