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Rare earth-containing oxide member 发明授权

2023-03-12 3190 89K 0

专利信息

申请日期 2025-09-11 申请号 JP2001258981
公开(公告)号 JP4663927B2 公开(公告)日 2011-04-06
公开国别 JP 申请人省市代码 全国
申请人 Shin Etsu Chemical Co Ltd2060
简介 The present invention is a rare earth-containing oxide member comprising a substrate comprising at least one element selected from group consisting of C, Si, Al, Ni, Ti, Fe, Mo, Ta and W, or an alloy comprising at least one element selected from group consisting of Si, Al, Ni, Ti, Fe, Mo, Ta and W; and a compound oxide laminated to the substrate, the compound oxide comprising a rare earth element (inclusive of Y) and Al and having a composition of 40 to 90 mole % of rare earth oxide and 10 to 60 mole % of Al2O3, based on the total amount of the oxides. The present invention also provides a heat-treating jig using such a rare earth-containing oxide member wherein the total amount of iron family elements, alkali metal elements and alkaline earth metal elements is not greater than 20 ppm.


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