| 简介 |
An aluminum oxide sintered product according to the present invention includes a layer phase containing a rare-earth element and fluorine among grains of aluminum oxide serving as a main component, or a phase containing a rare-earth element and fluorine along edges of grains of aluminum oxide serving as a main component. Such an aluminum oxide sintered product includes a phase containing a rare-earth element and a fluorine element among grains of aluminum oxide, the phase not being in the form of localized dots but in the form of line segments, when viewed in an SEM image. An aluminum oxide sintered product according to the present invention can be readily adjusted to have a volume resistivity in the range of 1 × 10 13 to 1 × 10 16 ©·cm, the volume resistivity being calculated from a current value after the lapse of 1 minute from the application of a voltage of 2 kV/mm to the aluminum oxide sintered product at room temperature. |
客服热线：
手机版
二维码
