| 简介 |
PROBLEM TO BE SOLVED : To provide a sputtering target for a reflection layer of an optical medium excellent in surface smoothness which is composed mostly of relatively inexpensive aluminum and does not use rare earth metal, and a method for manufacturing thereof.
SOLUTION : The sputtering target for a reflection layer of an optical medium is mainly composed of Al and contains 1-10 at% of one or two species of elements selected from the group consisting of Ta and Nb, and 0.1-10 at% of Ag. The method for manufacturing the sputtering target for a reflection layer of an optical medium includes a process for firing raw material powder having a composition that is mainly composed of Al and contains 1-10 at% of one or two species of elements selected from the group consisting of Ta and Nb, and 0.1-10 at% of Ag.
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