| 简介 |
PROBLEM TO BE SOLVED : To detect one-dimensional or two-dimensional mechanical quantity at high sensitivity by laminating insulation layers of insulating or high resistance material and conductive layers of insulating matrix material dispersed discontinuously with conductive particles alternately. SOLUTION : A conductive layer 11 is composed of a mother material, i.e.. an insulating matrix material, and conductive particles wherein the insulating matrix material comprises a metal oxide, a metal nitride, metal carbide, a composite compound thereof, or the like. The conductive particles are a combination of a group IIIa-VIII metal element, a group Ib-IVb metal element or a rare earth element or a silicide, nitride, carbide, boride, or the like, of one or more element selected therefrom. The insulating or high resistance material of an insulation layer 12 is selected from oxides, a part of nitrides, a part of carbides of metal elements or rare earth elements, a composite compound thereof, solid solution, and the like. A high sensitivity mechanical quantity sensor 1 obtained by laminating the conductive layers 11 and the insulation layers 12 alternately exhibits a linear strain-electric resistance effect over a wide range of stress being applied. |
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