| 申请日期 | 2025-06-26 | 申请号 | KR1020107027175 |
| 公开（公告）号 | KR1020110014179A | 公开（公告）日 | 2011-02-10 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | AIR LIQUIDE | ||
| 简介 | Methods and compositions for depositing rare earth metal-containing layers are described herein. In general, the disclosed methods deposit the precursor compounds comprising rare earth-containing compounds using deposition methods such as chemical vapor deposition or atomic layer deposition. The disclosed precursor compounds include a cyclopentadienyl ligand having at least one aliphatic group as a substituent and an amidine ligand. | ||
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