| 简介 |
PROBLEM TO BE SOLVED : To provide a raw material for chemical vapor deposition(CVD), which is used for manufacturing a functional ceramic containing a rare earth element and a metallic compound of a rare earth element, and the metallic compound using the same. SOLUTION : The raw material for chemical vapor deposition contains a metallic compound expressed by formula (1). (In the formula, M represents the rare earth element and one of R1 and R2 represents a 1-8C alkyl group and another one of R1 and R2 represents a 6-10C alkyl group, in which 1-3 oxygen atoms can be contained). |
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