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The process for coating the thin film on the ring of rare earth metal oxide-ion-assisted vapor depos 发明授权

2023-03-04 4470 3394K 0

专利信息

申请日期 2025-07-11 申请号 JP2016527049
公开(公告)号 JP6487915B2 公开(公告)日 2019-03-20
公开国别 JP 申请人省市代码 全国
申请人 APPLIED MATERIALS INCORPORATED
简介 A ring shaped body includes a top flat region, a ring inner side and a ring outer side. The ring inner side comprises an approximately vertical wall. A conformal protective layer is disposed on at least the top flat region, the ring inner side and the ring outer side of the ring shaped body. The protective layer has a first thickness of less than 300 μm on the top flat region and a second thickness on the vertical wall of the ring inner side, where the second thickness is 45-70% of the first thickness.


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