| 简介 |
PROBLEM TO BE SOLVED : To provide an aluminum nitride sintered compact which has high strength, high thermal conductivity, and reduced warp and which is suitable as a ceramic substrate, and its producing process. SOLUTION : The aluminum nitride sintered compact has a grain boundary phase comprising a single component of a rare earth-aluminum oxide, warpage of ≤5 μm/cm, three point bending strength of ≥400 MPa, and a thermal conductivity of ≥160 W/m×K. Such an aluminum nitride sintered compact is produced by using a formed body containing an aluminum nitride powder, a sintering aid of a rare earth compound, and an organic binder formed from an acrylic resin, and appropriately controlling degreasing and firing conditions. In this case, it is preferable that the degreasing and firing are sequentially performed. COPYRIGHT : (C)2004, JPO |
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