申请日期 | 2025-07-17 | 申请号 | JP2005037937 |
公开(公告)号 | JP4579709B2 | 公开(公告)日 | 2010-11-10 |
公开国别 | JP | 申请人省市代码 | 全国 |
申请人 | Kobe Steel Ltd1199; Kobelco Co for scientific research130259 | ||
简介 | An Al-base alloy sputtering target comprising Ni and one or more rare earth elements, wherein there are 5.0 × 10 4 /mm 2 or more compounds whose aspect ratio is 2.5 or higher and whose equivalent diameter is 0.2µm or larger, when a cross sectional surface perpendicular to the plane of the target is observed at a magnification of 2000 or higher. |
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