| 简介 |
PROBLEM TO BE SOLVED : To provide an excimer discharge lamp in which discharging to a tip pipe is suppressed.
SOLUTION : The excimer discharge lamp includes a discharge container having a discharge space inside of it, a pair of electrodes provided on the outside surface of the discharge container, and discharge gas containing at least rare gas and halogen or halide, being sealed in the discharge space. The discharge container includes a tubular sidewall provided with the pair of electrodes, one end wall which seals one end of the sidewall, and the other end wall provided to the other end of the sidewall. The sidewall and the pair of end walls comprise sapphire, YAG, or single crystal yttria. The other end wall is provided with a tip pipe of metal. A barrier wall of sapphire, YAG, or single crystal yttria is provided to the end wall positioned closest to the inside surface of the sidewall, and to the tip pipe, to which the pair of electrodes are provided.
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