| 简介 |
PROBLEM TO BE SOLVED : To provide an organic EL element and its manufacturing method for reducing the driving voltage in the initial period and suppressing elevation of the driving voltage at continuous driving.
SOLUTION : In the method of manufacturing the organic EL element in which the lower part electrode 21, an organic EL layer 22, the upper part electrode 23, and a sealing membrane 24 are formed and laminated on a support substrate 31 in this order, after forming the lower part electrode 21 having an oxide transparent conductive membrane on the surface side, on the lower part electrode 21 surface, a surface treatment process to apply plasma treatment is added in a rare gas of a discharge electric power within a range of 1.0×10-2 W/cm2 to 3.0×10-1 W/cm2.
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