| 简介 |
PROBLEM TO BE SOLVED : To provide a vapor-deposited film producing apparatus which prevents defects or the formation of projections of a deposited film made of aluminum, etc., on a surface of a rare earth metal permanent magnet and produces the deposited film having a high quality such as corrosion resistance at low cost. SOLUTION : In this vapor-deposited film producing apparatus of the first embodiment, a cylindrical barrel is supported in a revolving manner outwardly in the circumferential direction of the axis of rotation of a supporting member rotatable around the axis of rotation in the horizontal direction, and the distance between the cylindrical barrel revolving around the axis of rotation of the supporting member and an evaporation part is variable by rotating the supporting member. In this vapor-deposited film producing apparatus of the second embodiment, the inside of the cylindrical barrel is split, and at least two storage parts are formed so that the distance between the storage parts and the evaporation part is variable by rotating the cylindrical barrel. |
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