| 申请日期 | 2025-06-26 | 申请号 | JP2005189811 |
| 公开（公告）号 | JP4544425B2 | 公开（公告）日 | 2010-09-15 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | Shin Etsu Chemical Co Ltd2060 | ||
| 简介 | By using a rare earth metal having a minimal content of impurity metal element, machining it into a member and cleaning with an organic acid-base capping agent, there is obtained a rare earth metal member composed entirely of a rare earth metal and containing not more than 100 ppm of impurity metal element in a sub-surface zone, which member is characterized by a high surface purity, a large grainsize, minimized grain boundaries, and improved halogen resistance or corrosion resistance. | ||
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