| 简介 |
PROBLEM TO BE SOLVED : To provide an excimer discharge lamp having a longer optical output decay period.
SOLUTION : The excimer discharge lamp includes a discharge container having a metal-brazed sealing structure, the discharge container being filled with rare gas and gas containing fluorine (F) atoms, wherein at least a pair of external electrodes are arranged outside the discharge container while opposing each other across the discharge container. The sealing structure has a metal member and metal brazing material. A relation of D≥8×105/P is satisfied where D (mm) is a shortest clearance between the end of a discharge region in the discharge container and the metal member or the metal brazing material whichever closer to the end of the discharge region in the discharge container, and P (Pa) is total pressure in the discharge container filled with of the gas.
COPYRIGHT : (C)2010, JPO&INPIT |
客服热线：
手机版
二维码
