| 简介 |
PROBLEM TO BE SOLVED : To provide : a transparent conductive film mainly made of metal oxide; a method of manufacturing the same; and a device including the same.
SOLUTION : The transparent conductive film 16 is obtained by being exposed in gas plasma mainly containing rare gas in a high-frequency field to an amorphous precursor film 14 of the metal oxide containing an added metal element deposited on a base 12, and subjecting it to reforming treatment under reduction conditions. Here, the amorphous precursor film 14, after being exposed to the plasma, is put under an annealing treatment under a reduction atmosphere to perform reforming treatment under reduction conditions. The metal oxide is to be mainly made of titanium, and may be one using niobium as the added metal element.
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