| 简介 |
PROBLEM TO BE SOLVED : To manufacture a ZnO vapor deposition material which is excellent in composition uniformity by suppressing the segregation of rare earth oxides containing ≥2 and ≤17 kinds of elements selected from the rare earth group to be added to ZnO raw material powder, and to manufacture a ZnO vapor deposition material capable of obtaining a ZnO film uniform in deposition film composition.
SOLUTION : The ZnO raw material powder 15 having the average grain size of 0.1-10 μm is set in a transferring condition, a coating liquid 14 containing rare earth oxide powder 11 containing ≥2 and ≤17 kinds of rare earth elements having the average grain size of 0.05-5 μm is sprayed or jetted in the ZnO powder to form a coating layer having the thickness of 0.05-5 μm on its surface to form granular material 19. By using the granular material 19 or calcinated powder 24 obtained by calcinating the granular material, and then, disintegrating it, the first granulated powder 20 or the second granulated powder 29 is produced, and the ZnO vapor deposition material consisting of ZnO sintered compact 22 or 32 is produced through molding and sintering.
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