| 简介 |
PROBLEM TO BE SOLVED : To provide a piezoelectric vibrator which has a through electrode providing sure conduction between a piezoelectric vibrating piece and an external electrode with rare occurrence of a large stress caused during cooling after heating and during deformation of a mounted base substrate, while maintaining hermeticity of a cavity.
SOLUTION : The piezoelectric vibrator 1 having the piezoelectric vibrating piece 4 sealed in the cavity C formed between a base substrate 2 and a lid substrate 3 bonded to each other includes through electrodes 32 and 33 disposed in through-holes 30 and 31 penetrating through the base substrate 2 in the thickness direction. The through electrodes 32 and 33 have a glass frit filled in the through-holes and fired and a core material part 7 formed of a material containing only iron and nickel as metals and disposed in the through-holes together with the glass frit to conduct the outside of the cavity and the piezoelectric vibrating piece. The values of the thermal expansion coefficients of the base substrate 2, the glass frit, and the core material part 7 are set to be the base substrate ≥ the glass frit > the core material part.
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