| 简介 |
PROBLEM TO BE SOLVED : To provide a method of growing a high-density carbon nanotube by preventing agglomeration of the catalyst fine particles.
SOLUTION : The method of growing the high-density carbon nanotube comprises : a first plasma treatment process of treating the surface of a substrate provided with the catalyst fine particles by the plasma species generated from a gas containing at least hydrogen or a rare gas excluding carbon; a second plasma treatment process of forming a carbon layer on the surface of the catalyst fine particles by the plasma generated from a gas containing at least hydrocarbons after the first process; and a carbon nanotube growth process of growing the carbon nanotube by the plasma generated from the gas containing at least hydrocarbons after the second process.
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