| 申请日期 | 2025-06-29 | 申请号 | KR1020080065834 |
| 公开（公告）号 | KR100973110B1 | 公开（公告）日 | 2010-07-23 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | USHIO DENKI KABUSHIKI KAISHA | ||
| 简介 | A excimer lamp comprises an electric discharge container in which a sealing member is provided between a lid member and an arc tube which does not contain silica, and a pair of external electrodes which are separately provided on an outer surface of the arc tube, wherein rare gas and a fluoride is enclosed in the electric discharge container, and the fluoride is sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride. | ||
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