| 申请日期 | 2025-07-07 | 申请号 | US12632712 |
| 公开（公告）号 | US20100140222A1 | 公开（公告）日 | 2010-06-10 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | SUN JENNIFER Y; DUAN REN GUAN; THACH SENH; XU LI | ||
| 简介 | A filled polymer composition having improved plasma resistance is disclosed. The composition includes a particle filler dispersed in a polymer matrix. The particle filler can be Nb2O5, YF3, AlN, SiC or Si3N4 and rare earth oxides. In an embodiment, the composition is utilized as a bonding adhesive for electrostatic chuck, bonding adhesive for shower head, bonding adhesive for liner, sealing material, O-ring, or plastic component. | ||
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