| 简介 |
PROBLEM TO BE SOLVED : To provide a cerium-based abrasive realizing high grinding speed and much excellent in grinding precision as well, and to provide an abrasive intermediate readily giving a cerium-based abrasive provided with such an excellent grinding characteristic. ?SOLUTION : This cerium-based abrasive has ≥30 mass% cerium oxide content (CeO2/TREO) in TREO (total rare earth oxide), where the 50% diameter (D50) in volume-based cumulative fractions of the particle diameter distribution measured by a laser diffraction scattering method is 0.1-0.5 μm, and the ratio (D50/DSEM) of the 50% diameter (D50) to the number-average particle diameter (DSEM) of the abrasive particles in the image of the abrasive observed by a scanning electron microscope measured by approximating as a circle is 1.0-2.0. ?COPYRIGHT : (C)2007, JPO&INPIT ? |
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