| 简介 |
PROBLEM TO BE SOLVED : To provide a device for manufacturing a crystal capable of manufacturing the crystal at a desired position on a substrate.
SOLUTION : One end of a spring 2 is fixed to a rack 1 and the other end is connected to a magnetic body 3. One end of the magnetic body 3 is connected to the spring and the other end is connected to a piston 6. A coil 4 is wound around the magnetic body 3 and also electrically connected between a power circuit 5 and an earth ground node GND. The piston 6 has a straight line member 61 inserted into a cylinder 7. The cylinder 7 is of a hollow columnar shape and has a small hole 71 on the bottom surface 7B. The cylinder 7 holds a silicon molten liquid 13. The substrate 11 is supported by a XY stage 12 so as to oppose to the small hole 71 of the cylinder 7. A pulsed-current is allowed to flow in the coil 4 by the power circuit 5 and the piston 6 is moved to a vertical direction DR1. As a result, a droplet 14 is injected from the small hole 71 toward the substrate 11 at an initial speed of 1.02 m/s.
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