| 简介 |
PROBLEM TO BE SOLVED : To provide an aluminum oxide sintered compact that can be adjusted to have a volume resistivity between that of a Coulomb type one and a Johnson-Rahbeck type one and has excellent corrosion resistance.
SOLUTION : The aluminum oxide sintered compact includes a laminar phase containing a rare-earth element and fluorine among grains of aluminum oxide serving as a main component, or a phase containing a rare-earth element and fluorine along edges of grains of aluminum oxide serving as a main component. The aluminum oxide sintered compact includes a phase containing a rare-earth element and a fluorine element among grains of aluminum oxide, the phase not being in the form of localized dots but in the form of line segments, when viewed in an SEM image. The aluminum oxide sintered compact can be readily adjusted to have a volume resistivity in the range from 1×1013 to 1×1016 Ω cm, the volume resistivity being calculated from a current value after the lapse of 1 minute from the application of a voltage of 2 kV/mm to the aluminum oxide sintered compact at room temperature.
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