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Excimer lamp lighting device 发明授权

2023-03-30 4920 55K 0

专利信息

申请日期 2025-06-25 申请号 JP2004245455
公开(公告)号 JP4431881B2 公开(公告)日 2010-03-17
公开国别 JP 申请人省市代码 全国
申请人 Ushio Inc102212
简介 The invention relates to an operating device for excimer lamps, comprising at least one excimer lamp (5) with a discharge space in which rare gas is filled, a power source (1) for operating the at least one excimer lamp, a lamp housing (9) in which the at least one excimer lamp is arranged and which comprises a window part (8) made of glass transparent for excimer light emitted by the at least one excimer lamp. The window part is provided with an induction heating coil (6) supplied by the power source for operating the at least one excimer lamp and with a conductor (7, 71, 72) for an induction heating, with the conductor for an induction heating being configured in such a way that the excimer light is allowed to pass through the window part, such that it is subjected by the induction heating coil to an induction heating, as a result of which the window part is heated.


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