| 申请日期 | 2025-06-25 | 申请号 | KR1020067001411 |
| 公开（公告）号 | KR100945095B1 | 公开（公告）日 | 2010-02-23 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | ENTEGRIS INC | ||
| 简介 | A method for hydride gas purification uses materials having at least one lanthanide metal or lanthanide metal oxide. The method reduces contaminants to less than 100 parts per billion (ppb), preferably 10 ppb, more preferably 1 ppb. The material can also include transition metals and transition metal oxides, rare earth elements and other metal oxides. The invention also includes materials for use in the method of the invention. | ||
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