申请日期 | 2025-06-24 | 申请号 | EP01111533 |
公开(公告)号 | EP1156131B1 | 公开(公告)日 | 2010-01-27 |
公开国别 | EP | 申请人省市代码 | 全国 |
申请人 | Oerlikon Trading AG Trübbach | ||
简介 | Prior to coating the product surface is pretreated in a chamber(11) with an exited gas atmosphere comprising a rare gas and nitrogen and/or hydrogen. Ion energy in the gas and close to the substrate surface is NOTGREATER 50eV. An Independent claim is made for a use for the process in the manufacture of optical data storage discs, optical lenses, printed circuit boards or parts for semi-conductor production. |
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