| 简介 |
Sintered compacts of rare-earth-element borides, in particular, LaB6, were proved unsuitable for use as a sputtering member or the like because a pollutant is present therein in a large amount. Based on a new view that the contamination by conventional sintered compacts of LaB6 is attributed to the existence of a large amount of pores, an LaB6 compact is pressed in a hot-press furnace and then subjected to HIP. Pores are thus diminished to attain a porosity of 7 vol.% or lower, preferably 1 vol.% or lower. Thus, a member reduced in pollutant content can be formed. |
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