| 简介 |
PROBLEM TO BE SOLVED : To provide a cerium-based abrasive containing no fluorine, improved in not only abrasive activity but also grinding accuracy. SOLUTION : The cerium-based abrasive contains ≥30 wt.% cerium oxide based on the total rare earth oxide (TREO) and has ≤0.5 wt.% fluorine content based on TREO, wherein the cerium-based abrasive contains 0.01-3.0 wt.% at lest one alkali metal selected from a group consisting of sodium, potassium and lithium based on TREO as a whole, and has ≤0.3 wt.% chlorine content. The content of at least one alkali metal selected from a group consisting of sodium, potassium and lithium is preferably 0.02-1.0 wt.% (TREO base), and, in that case, the chlorine content is preferably ≤0.1 wt.%. COPYRIGHT : (C)2006, JPO&NCIPI |
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